Thermal Oxidizer (TO) Systems
Can be designed under up to 1200°C condition
Emission Control
High-Concentration VOCs Abatement
>99%Destruction Efficiency
Built-inHeat Recovery HEX
Our Direct Fired Thermal Oxidizers (TO) are robust systems engineered to effectively break down high-concentration combustible VOCs.
Designed for operational efficiency, they feature built-in high-temperature heat exchangers that preheat incoming waste gas, drastically reducing auxiliary fuel usage. With processing efficiency over 99%, our TO systems are trusted in strict emission control applications, including precision exhaust management for advanced semiconductor manufacturing facilities handling 28nm and 55nm process nodes.
System Integration & Site View
Frequently Asked Questions
What is a Direct Fired Thermal Oxidizer (TO)?
A Direct Fired TO is a combustion-based air pollution control device that destroys volatile organic compounds (VOCs) by heating contaminated air to 760-1100°C in a combustion chamber, achieving over 99% destruction efficiency.
When should I choose a TO over an RTO?
A Direct Fired TO is preferred for high-concentration VOCs (typically >5 g/m³), viscous or polymer-containing exhaust streams, and applications where the heat content of the VOCs can offset fuel costs. RTOs are better for large air volumes with low VOC concentration.
How does the integrated heat recovery work?
Our TO systems include a built-in high-temperature plate heat exchanger that preheats incoming waste gas using the hot oxidized exhaust. This reduces fuel consumption by 40-60% compared to systems without heat recovery.
Is it suitable for semiconductor manufacturing?
Yes. Our TO systems are specifically designed and proven for semiconductor fab exhaust treatment, including 28nm and 55nm process nodes, handling complex mixtures of fluorinated compounds and organic solvents.
What is the typical destruction efficiency?
Our Direct Fired TO systems achieve greater than 99% VOC destruction rate efficiency, meeting or exceeding emission regulations in all major markets including EU, US EPA, and China GB standards.